Modelling and simulation of microresonators with meander suspensions
نویسندگان
چکیده
Surface-micromachined comb-drive resonators suspended by meander springs are modelled and simulated. General analytic expressions for lateral spring constants and effective mass of meander springs are derived and verified by finiteelement simulations. The spring constant equations are accurate to within 1% over a wide range of geometries. Analytic, simulated, and measured resonant frequency values agree to within 0.3% for each of ten different microresonator designs.
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